광학시스템

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광학시스템

노광 (점광원)
경화&건조
(점광원)
노광
(산란광원)
경화&건조
(산란광원)
표면개질 & 검사
UV-LED

산란광원(Long Arc Lamp)을 이용한 노광

LCD S-PVA(Super Patterned Vertical Alignment)용 전면 UV노광 장치

Model : Exposure Area, UV Lamp, Wave Length, Scan Speed, UV Intensity, UV Uniformity, Lamp Load, Lamp Life time, Dimension, Weight, Exhaust Type, Optics, Lamp House, Control, Power Supply

LAB용 산란 UV노광 & 조사 장치

Model : Exposure Area, UV Lamp, Wave Length, Scan Speed[Exposure Type], UV Intensity, UV Uniformity, Lamp Load, Lamp Life time, Dimension, Weight, Exhaust Type, Optics, Control, Power Supply

LTPS LCD용 Scan UV 전면 노광 시스템

Photo mask용 Scan UV 반전 노광 시스템

Model : Exposure Area, UV Lamp, Wave Length, Scan Speed, UV Intensity, UV Uniformity, Lamp Load, Lamp Life time, Dimension, Weight, Exhaust Type, Optics, Lamp House, Control, Power Supply