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光学系统

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光学系统

曝光 (点光源)
固化 & 干燥
(点光源)
曝光
(散乱光源)
固化 & 干燥
(散乱光源)
表面改质 & 检查
UV-LED

散射光源(Long Arc Lamp)光学系统

超级图案化的垂直对齐(LCD S-PVA)用全面UV曝光装置

Model : Exposure Area, UV Lamp, Wave Length, Scan Speed, UV Intensity, UV Uniformity, Lamp Load, Lamp Life time, Dimension, Weight, Exhaust Type, Optics, Lamp House, Control, Power Supply

研究所用散射UV曝光 & 照射装置

Model : Exposure Area, UV Lamp, Wave Length, Scan Speed[Exposure Type], UV Intensity, UV Uniformity, Lamp Load, Lamp Life time, Dimension, Weight, Exhaust Type, Optics, Control, Power Supply

LTPS LCD用扫描全面曝光系统

光掩膜用扫描UV反转曝光系统

Model : Exposure Area, UV Lamp, Wave Length, Scan Speed, UV Intensity, UV Uniformity, Lamp Load, Lamp Life time, Dimension, Weight, Exhaust Type, Optics, Lamp House, Control, Power Supply