Optical System
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Exposure System using Short Arc Lamp
RTR UV exposure system (double-side, simultaneously)
UVB(313nm) & UVA(365nm) polarized light alignment UV exposure system
Manual parallel UV exposure system
Compact parallel UV exposure system (Mask Aligner)
Parallel UV scan exposure system
UV Edge Exposure
Light source for image exposure (DMD light source)
Semi UV exposure and semi UV irradiation system