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Industrial Lamp

Excimer Lamp

액시머 램프(Excimer Lamp)

Description

  • A feature of excimer light emission is that it has only one emission peak. It emits light within an
    extremely narrow wavelength rage.

Application

  • ▪ Optical Surface Cleansing for Wafer, LCD, C/F process
  • ▪ De-ionized Water Process, Producing Ozone
  • ▪ Removing Minute Particles from Metallic Materials

Specification

KrCl*(222nm), XeI*(253nm), XeCl*(308nm), Xe*(172nm), Xe*(172nm)

  • * Products of other specification than those described above can be provided
    (The models above are representative ones)
  • * Please inquire about development request.