Excimer Lamp

Description

• A feature of excimer light emission is that it has only one emission peak. It emits light within an
  extremely narrow wavelength rage.

Application

• ▪ Optical Surface Cleansing for Wafer, LCD, C/F process
• ▪ De-ionized Water Process, Producing Ozone
• ▪ Removing Minute Particles from Metallic Materials

Specification

• * Products of other specification than those described above can be provided
  (The models above are representative ones)
• * Please inquire about development request.